全自動光激發光系統

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全自動光激發光系統

商品編號 : Maple308X

全自動光激發光系統

光激發光系統(High Speed Automatic PL Mapping System)

Software for PL mapping data
光激發光系統

Intensity
光激發光系統

Wavelength
光激發光系統

Features:

  • Fully automated with a robot arm
  • Fastest PL mapping speed
  • Saleable wafer size:2~8 inch
  • Safety cautious design
  • User-friendly software and support
  • Fully CE complied & certified

 

System Main Specificaton:

  • Wafer size:2,4,6,8 inch available
  • 266,325,375,405nm laser available
  • Inside two excitation source & out side additional excitation source available
  • Mapping step resolution:1.0/2.0/4.0mm
  • Mapping speed:<30min/2 inch 24 cassette 2mm step resolution
  • Real time laser power control and monitor
  • Wafer auto loading & unloading by transport robot
  • Thin film thickness measurement by white light source
  • Wavelength range:200~1100nm

 

Up to 48ea wafer 2~8 inch wafer loading robot
光激發光系統