>> 特色
1. High performance & Low cost PL Mappomg
2. Wide extension wavelength range(UV-VIS-NIR)
3. Compact design & high resolution
4. Thin filn thickness measurements
5. High speed Automatic system
(For the mass-production) |
>> 軟體
• Integrated mode for high speed mapping
• Spectral mode with PL intensity , peak, FWHM
• Thickness mode for the measurement of thin film
• Display oprion for 2D & 3D
• Easy control with your recipe
• Supportlng recipe flles and reclpe deltor
• Speed : approx. 25min. / cassette(25pcs)-2" , 2mm step. |
>> 規格
1. Spectrometer:
◎ Wavelength range : 200nm - 1,100nm(UV-VIS-NIR)
◎ Detector : Low noise CCD linear array, 2048pixels
2. Lasera :
◎ Laser source : 375nm, 405nm standard.
(266nm, 325nm, 442nm, 532nm, 633nm, 785nm, etc, any laser sources are available)
3. Thin film thickness measurements
◎ Thickness : 10nm – 50nm, 1nm resolution
◎ Light source : Deuterrium-halogen light source
4. Auto loading / unloading / Aligner
◎ Water size : 2” , 4” , 6” , 25pcs cassette package |
