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單軌全自動曝光機

商品編號:AGAuto

單軌全自動曝光機

單軌全自動曝光機

全自動曝光機(Auto Mask Aligner)

適用基板尺寸:

  • 半導體/微機電/發光二極體/被動元件(Semiconductor/MEMS/LED/Passive Component)
  • 觸控面板/顯示器(Touch Panel/Display Panel)
  • 適用尺寸:substrate size2”~8”、8”~12”
  • Fully Auto Alignment
  • Auto Loading /Unloading
  • Light Source
  • Exposure light source:350W, 500W, 1000W, 2000W
  • Exposure area:6”~12”
  • Uniformity:≧3% to ≦5%
  • Alignment System
  • Alignment Accuracy:±1um
  • Alignment Target:Customer designed
  • X axis range:±70mm
  • Y axis range:±15mm
  • Z axis range:±10mm
  • Exposure Gap:up to 1000um
  • Gap Adjustment Resolution:1um
  • Alignment Stage
  • X axis range:±5mm
  • Y axis range:±5mm
  • θ axis range:±3°
  • Axis resolution:0.1um
  • Wafer Handing
  • Robot Handing
  • Wafer Size:2”~200mm
  • Throughput:>105wph
  • High precision prealigner