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正/負形光阻

Chemical

正/負形光阻

正/負形光阻(Chemical)

1) SU8 1040 (厚高深寬比負光阻0.8 to 10μm)
2) SU81060 (厚高深寬比負光阻6.0 to 50μm)
3) SU81070 (厚高深寬比負光阻15 to 200μm)
4) SU81075 (厚高深寬比負光阻>100μm)
5) SU8 Developer (顯影液)
6) SU8 Stripper (去光阻液)
7) D-35 (Metal Ion 無機濃縮顯影液)
8) DS-10 (PC-60i &20i去光阻液 & NPR-10D顯影液)
9) VLSI-237 (Metal Ion Free有機顯影液)
10) NPR-20 (Negative Photoresist 負光阻)
11) NPR-2500F (Negative Photoresist 耐酸負光阻)
12) NPR-7000F (Negative Photoresist 耐酸負光阻)
13) PR-10 (Positive Photoresist正光阻)
14) PC-20i (Protective Coating樹脂保護膠)
15) S-100 (正負兩用光阻剝膜液 & PC-20i有機剝膜液)
16) S-6000 (Positive & Negative Photoresist 正負光阻)